Keita Yagi

Novel abrasive-free planarization of 4H-SiC (0001) using catalyst

Hideyuki Hara, Yasuhisa Sano, Hidekazu Mimura et al. · Journal of Electronic Materials · 2006 · 133 citations

Materials Engineering, Materials Science, Chemical Engineering +6

Atomic-scale flattening of SiC surfaces by electroless chemical etching in HF solution with Pt catalyst

Kenta Arima, Hideyuki Hara, Junji Murata et al. · Applied Physics Letters · 2007 · 89 citations · Full text

Materials Science, Materials Engineering, Chemical Engineering +15

Catalyst‐referred etching of 4HSiC substrate utilizing hydroxyl radicals generated from hydrogen peroxide molecules

Keita Yagi, Junji Murata, Akihisa Kubota et al. · Surface and Interface Analysis · 2008 · 53 citations

A Study on a Surface Preparation Method for Single-Crystal SiC Using an Fe Catalyst

Akihisa Kubota, Keita Yagi, Junji Murata et al. · Journal of Electronic Materials · 2008 · 44 citations

Materials Engineering, Materials Science, Chemical Engineering +8

Atomically Smooth Gallium Nitride Surfaces Prepared by Chemical Etching with Platinum Catalyst in Water

Junji Murata, Takeshi Okamoto, Shun Sadakuni et al. · Journal of The Electrochemical Society · 2012 · 44 citations

Engineering, Flattened Gan, Surface Processing +18