Junji Murata

Novel abrasive-free planarization of 4H-SiC (0001) using catalyst

Hideyuki Hara, Yasuhisa Sano, Hidekazu Mimura et al. · Journal of Electronic Materials · 2006 · 133 citations

Materials Engineering, Materials Science, Chemical Engineering +6

Polishing-pad-free electrochemical mechanical polishing of single-crystalline SiC surfaces using polyurethane–CeO2 core–shell particles

Junji Murata, Koushi Yodogawa, Kazuma Ban · International Journal of Machine Tools and Manufacture · 2016 · 117 citations

Materials Science, Engineering, Material Processing +7

Atomic-scale flattening of SiC surfaces by electroless chemical etching in HF solution with Pt catalyst

Kenta Arima, Hideyuki Hara, Junji Murata et al. · Applied Physics Letters · 2007 · 89 citations · Full text

Materials Science, Materials Engineering, Chemical Engineering +15

Environment-friendly electrochemical mechanical polishing using solid polymer electrolyte/CeO2 composite pad for highly efficient finishing of 4H-SiC (0001) surface

Junji Murata, Kenshin Hayama, Masaru Takizawa · Applied Surface Science · 2023 · 60 citations · Full text

Engineering, Mechanical Engineering, Silicon Carbide +19

Polymer/CeO2–Fe3O4 multicomponent core–shell particles for high-efficiency magnetic-field-assisted polishing processes

Junji Murata, Yoshihito Ueno, Koushi Yodogawa et al. · International Journal of Machine Tools and Manufacture · 2015 · 58 citations

Materials Science, Magnetism, Magnetic Properties +4