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Polishing-pad-free electrochemical mechanical polishing of single-crystalline SiC surfaces using polyurethane–CeO2 core–shell particles

Materials ScienceEngineeringMaterial ProcessingMechanical EngineeringSingle-crystalline Sic SurfacesSurface EngineeringSurface ModificationPolyurethane–ceo2 Core–shell ParticlesSurface TreatmentSurface Processing