Xu Yang

Highly efficient planarization of sliced 4H–SiC (0001) wafer by slurryless electrochemical mechanical polishing

Xu Yang, Xiaozhe Yang, Kentaro Kawai et al. · International Journal of Machine Tools and Manufacture · 2019 · 94 citations

Materials Science, Wafer Scale Processing, Engineering +8

Investigation of anodic oxidation mechanism of 4H-SiC (0001) for electrochemical mechanical polishing

Xu Yang, Rongyan Sun, Yuji Ohkubo et al. · Electrochimica Acta · 2018 · 78 citations

Materials Science, Materials Engineering, Engineering +9

Efficient and slurryless ultrasonic vibration assisted electrochemical mechanical polishing for 4H–SiC wafers

Xiaozhe Yang, Xu Yang, Haiyang Gu et al. · Ceramics International · 2021 · 59 citations

Materials Science, Engineering, Material Processing +6

Dominant factors and their action mechanisms on material removal rate in electrochemical mechanical polishing of 4H-SiC (0001) surface

Xiaozhe Yang, Xu Yang, Kentaro Kawai et al. · Applied Surface Science · 2021 · 51 citations

Materials Science, Materials Engineering, Engineering +11

Novel SiC wafer manufacturing process employing three-step slurryless electrochemical mechanical polishing

Xu Yang, Xiaozhe Yang, Kentaro Kawai et al. · Journal of Manufacturing Processes · 2021 · 48 citations

Materials Science, Materials Engineering, Engineering +9