Concepedia

Tunable ion flux density and its impact on AlN thin films deposited in a confocal DC magnetron sputtering system

Mathis Trant, Maria Fischer, Kerstin Thorwarth, Sven Gauter, Jörg Patscheider, Hans J. Hug

Surface and Coatings Technology · 2018 · 13 citations · 27 references

DOI

Concepts

References

27

Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

Morito Akiyama, Toshihiro Kamohara, Kazuhiko Kano et al. · Advanced Materials · 2008 · 1K citations

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A structure zone diagram including plasma-based deposition and ion etching

André Anders · Thin Solid Films · 2009 · 909 citations

, , +16

Crystal structure refinement of AlN and GaN

H. Schulz, K. H. Thiemann · Solid State Communications · 1977 · 676 citations

, , +12

Vibration energy harvesting with aluminum nitride-based piezoelectric devices

R. Elfrink, Talal M. Kamel, M.H. Goedbloed et al. · Journal of Micromechanics and Microengineering · 2009 · 451 citations

, , +16

Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications

M.-A. Dubois, Paul Muralt · Applied Physics Letters · 1999 · 439 citations · Full text

, , +17