Toshihiro Kamohara

Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

Morito Akiyama, Toshihiro Kamohara, Kazuhiko Kano et al. · Advanced Materials · 2008 · 994 citations

Materials Science, Materials Engineering, Alloy Thin Films +14

Flexible piezoelectric pressure sensors using oriented aluminum nitride thin films prepared on polyethylene terephthalate films

Morito Akiyama, Yukari Morofuji, Toshihiro Kamohara et al. · Journal of Applied Physics · 2006 · 156 citations

Polyethylene Terephthalate Films, Engineering, Mechanical Engineering +17

Influence of oxygen concentration in sputtering gas on piezoelectric response of aluminum nitride thin films

Morito Akiyama, Toshihiro Kamohara, Kazuhiko Kano et al. · Applied Physics Letters · 2008 · 79 citations

Materials Science, Aluminium Nitride, Oxygen Concentration +10

Preparation of Oriented Aluminum Nitride Thin Films on Polyimide Films and Piezoelectric Response with High Thermal Stability and Flexibility

Morito Akiyama, Yukari Morofuji, Toshihiro Kamohara et al. · Advanced Functional Materials · 2007 · 74 citations

Materials Science, High Thermal Stability, Aluminium Nitride +14

Influence of sputtering pressure on polarity distribution of aluminum nitride thin films

Toshihiro Kamohara, Morito Akiyama, Naohiro Ueno et al. · Applied Physics Letters · 2006 · 50 citations

Materials Science, Materials Engineering, Aluminium Nitride +12