Kazuhiko Kano

Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

Morito Akiyama, Toshihiro Kamohara, Kazuhiko Kano et al. · Advanced Materials · 2008 · 994 citations

Materials Science, Materials Engineering, Alloy Thin Films +14

Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films

Morito Akiyama, Kazuhiko Kano, Akihiko Teshigahara · Applied Physics Letters · 2009 · 381 citations

Materials Science, Aluminium Nitride, Piezoelectric Response +11

High-performance surface acoustic wave resonators in the 1 to 3 GHz range using a ScAlN/6H-SiC structure

Ken-ya Hashimoto, A. Teshigahara, Takuya Nakamura et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2013 · 143 citations

Electrical Engineering, Scaln/6h-sic Structure, Engineering +9

Influence of oxygen concentration in sputtering gas on piezoelectric response of aluminum nitride thin films

Morito Akiyama, Toshihiro Kamohara, Kazuhiko Kano et al. · Applied Physics Letters · 2008 · 79 citations

Materials Science, Aluminium Nitride, Oxygen Concentration +10

Preparation of scandium aluminum nitride thin films by using scandium aluminum alloy sputtering target and design of experiments

Morito Akiyama, Tatsuo Tabaru, Keiko Nishikubo et al. · Journal of the Ceramic Society of Japan · 2010 · 63 citations · Full text

Materials Engineering, Materials Science, Electrical Engineering +12