Akihiko Teshigahara

Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

Morito Akiyama, Toshihiro Kamohara, Kazuhiko Kano et al. · Advanced Materials · 2008 · 1K citations

Natural Sciences, Materials Engineering, Materials Science +16

Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films

Morito Akiyama, Kazuhiko Kano, Akihiko Teshigahara · Applied Physics Letters · 2009 · 391 citations

Natural Sciences, Materials Engineering, Materials Science +16

Influence of oxygen concentration in sputtering gas on piezoelectric response of aluminum nitride thin films

Morito Akiyama, Toshihiro Kamohara, Kazuhiko Kano et al. · Applied Physics Letters · 2008 · 80 citations

Natural Sciences, Materials Engineering, Materials Science +16

Preparation of scandium aluminum nitride thin films by using scandium aluminum alloy sputtering target and design of experiments

Morito Akiyama, Tatsuo Tabaru, Keiko Nishikubo et al. · Journal of the Ceramic Society of Japan · 2010 · 63 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film

Yuri Kusano, Itaru Ishii, Tatsuya Kamiya et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 2019 · 63 citations

Natural Sciences, Materials Science, Mechanical Engineering +17