Effect of interfacial layer on device performance of metal oxide thin-film transistor with a multilayer high-k gate stack

Dun‐Bao Ruan, Po‐Tsun Liu, Yu-Chuan Chiu, Po‐Yi Kuo, Min-Chin Yu, Kai-Zhi Kan, Ta-Chun Chien, Yi-Heng Chen, Simon M. Sze

Thin Solid Films · 2018 · 23 citations · 16 references

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