Thin Solid Films · 2018 · 23 citations · 16 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesThin FilmsIntegrated Circuit DesignMetal-oxide-semiconductor Field-effect TransistorsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film MaterialsThin-film TransistorsEquivalent Oxide ThicknessGate Dielectric EngineeringGate Oxide InterfacesGate Oxide Thickness EffectsGate OxidesGate Stack EngineeringThin Oxide FilmsThin Oxide Layers
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