Sensitivity analysis of an in-plane MEMS vibratory gyroscope

What is the Young's Modulus of Silicon?

Matthew A. Hopcroft, William D. Nix, Thomas W. Kenny · Journal of Microelectromechanical Systems · 2010 · 2K citations

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Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry

F.R. Blom, S. Bouwstra, Michael Curt Elwenspoek et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 445 citations · Full text

Engineering, Mechanical Engineering, Microelectromechanical Systems +16

A micromachined comb-drive tuning fork rate gyroscope

Jonathan Bernstein, S. Cho, A. Thomas King et al. · 2002 · 283 citations

Engineering, Electrical Engineering, Mechanical Engineering +11

Quadrature-Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes

Erdinc Tatar, Said Emre Alper · Journal of Microelectromechanical Systems · 2012 · 156 citations

Engineering, Electrical Engineering, Mechanical Engineering +13

A micromachined vibrating gyroscope

Katsuhiro Tanaka, Yoichi Mochida, Masakazu Sugimoto et al. · Sensors and Actuators A Physical · 1995 · 136 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +15