Applied Surface Science · 2017 · 25 citations · 28 references
EngineeringManufacturing EngineeringMechanical EngineeringMicroelectromechanical SystemsMicrofabricationNanotechnologyMachiningMicrofabrication ProcessesMicromachiningMicrostructure ControlNanoimprint LithographySurface MicromachiningMachining TechnologyMicroscale FabricationNanopatterning
28
E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations