A PROM element based on salicide agglomeration of poly fuses in a CMOS logic process

Concepts

Cmos Logic ProcessChemical EngineeringElectrical EngineeringEngineeringVlsi DesignCircuit DesignProm ElementNovel Programmable ElementCircuit SystemElectronic DesignComputer EngineeringComputer ArchitectureSystems EngineeringProgrammable DeviceNovel ProgrammingMicroelectronicsSalicide AgglomerationBeyond Cmos

Abstract

A novel programmable element has been developed and evaluated for state of the art CMOS processes. This element is based on agglomeration of the Ti-silicide layer on top of poly fuses. Various aspects of this programmable device including characterization and optimization of physical and electrical aspects of the element, programming yield, and reliability have been studied. Development of a novel programming and sensing circuit is also included.

References

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