MRS Proceedings · 1993 · 13 citations · 7 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsMetal-semiconductor ContactsSemiconductor Device MaterialsSemiconductor InterfacesSilicon MaterialsThermal Properties Of MaterialsThermal Properties Of SemiconductorsRapid Thermal AnnealingThermal AnnealingThermal Annealing Effects
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Effects of Ge concentration on SiGe oxidation behavior
H. K. Liou, Ping Mei, U. Gennser et al. · Applied Physics Letters · 1991 · 138 citations
Natural Sciences, Materials Engineering, Materials Science +17