Effects of Rapid Thermal Annealing on W/Si<sub>1−x</sub>Ge<sub>x</sub> Contacts - Concepedia

Concepedia

Publication | Closed Access

Effects of Rapid Thermal Annealing on W/Si<sub>1−x</sub>Ge<sub>x</sub> Contacts

13

Citations

7

References

1993

Year

V. Aubry, F. Meyer, R. Laval, C. Clerc, P. Warren, D. Dutartre

MRS Proceedings

Materials EngineeringEngineeringApplied PhysicsRapid Thermal AnnealingSemiconductor MaterialSemiconductor Device Fabrication

References

	Year	Citations

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