Concepedia

Publication | Closed Access

Effect of a novel chelating agent on defect removal during post-CMP cleaning

DOI

87

Citations

18

References

2016

Year

J. M. Hong, Xinhuan Niu, Yuling Liu, Yangang He, Baoguo Zhang, Juan Wang, Liying Han, Chenqi Yan, Jin Zhang
Applied Surface Science

References

YearCitations

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