Concepedia
Statistics
Publications
32
Citations
1.5K
H-Index
22
Active since
2004
Affiliations
Tsinghua University(Current)
University Town of Shenzhen
Key Laboratory of Guangdong Province
Chinese Academy of Sciences
Guangdong University of Technology
Guoshun Pan is an author at Tsinghua University specializing in materials science, materials engineering, and surface science.
Publications per year
2004–2023
Effects of ultra-smooth surface atomic step morphology on chemical mechanical polishing (CMP) performances of sapphire and SiC wafers
Yan Zhou, Guoshun Pan, Xiao‐Lei Shi et al. · Tribology International · 2015 · 112 citations
Engineering, Materials Engineering, Materials Science +16
Characterization of colloidal silica abrasives with different sizes and their chemical–mechanical polishing performance on 4H-SiC (0001)
Xiao‐Lei Shi, Guoshun Pan, Yan Zhou et al. · Applied Surface Science · 2014 · 105 citations
Natural Sciences, Materials Engineering, Materials Science +15
Ultrasonic flexural vibration assisted chemical mechanical polishing for sapphire substrate
Wenhu Xu, Xinchun Lu, Guoshun Pan et al. · Applied Surface Science · 2010 · 95 citations
Engineering, Materials Engineering, Materials Science +14
Chemical mechanical polishing (CMP) of on-axis Si-face 6H-SiC wafer for obtaining atomically flat defect-free surface
Guoshun Pan, Yan Zhou, Guihai Luo et al. · Journal of Materials Science Materials in Electronics · 2013 · 87 citations
A study of chemical products formed on sapphire (0001) during chemical–mechanical polishing
Xiao‐Lei Shi, Guoshun Pan, Yan Zhou et al. · Surface and Coatings Technology · 2015 · 87 citations
1–5 of 32