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Characterization of colloidal silica abrasives with different sizes and their chemical–mechanical polishing performance on 4H-SiC (0001)

Materials EngineeringMaterials ScienceChemical EngineeringEngineeringCeramic MaterialMechanical EngineeringMaterials CharacterizationCarbideAbrasive ProcessColloidal SilicaChemical–mechanical Polishing PerformanceCeramic PowdersDifferent SizesAbrasive MachiningMicrostructure