Publication | Closed Access
Ultrasonic flexural vibration assisted chemical mechanical polishing for sapphire substrate
92
Citations
15
References
2010
Year
Materials ScienceUltrasonic Flexural VibrationEngineeringMaterial ProcessingMicrofabricationMechanical EngineeringSurface PolishingAcoustic MicroscopySurface Processing3D PrintingMicromachined Ultrasonic Transducer
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