Concepedia

Substrate Polishing

Substrate Polishing is a surface refinement process within materials science that systematically removes surface irregularities and contaminants from a substrate through mechanical, chemical, or electrochemical means to achieve a highly smooth and defect-free surface essential for subsequent thin-film deposition or microfabrication processes.

76

Publications

2.2K

Citations

330

Authors

112

Institutions

Publications per year

2017–2026

27

Parents

Publications

76

Chemical polishing of bulk and epitaxial GaN

J.L. Weyher, S. Müller, I. Grzegory et al. · Journal of Crystal Growth · 1997 · 172 citations

, , +14

Ultrasonic flexural vibration assisted chemical mechanical polishing for sapphire substrate

Wenhu Xu, Xinchun Lu, Guoshun Pan et al. · Applied Surface Science · 2010 · 95 citations

, , +14

Two-step polishing technique for single crystal diamond (100) substrate utilizing a chemical reaction with iron plate

Akihisa Kubota, S. Nagae, Shuya Motoyama et al. · Diamond and Related Materials · 2015 · 66 citations

, , +11

Chemical mechanical polishing of steel substrate using colloidal silica-based slurries

Liang Jiang, Yongyong He, Jianbin Luo · Applied Surface Science · 2015 · 63 citations

, , +13

Effect of OH<sup>−</sup> on chemical mechanical polishing of β-Ga<sub>2</sub>O<sub>3</sub> (100) substrate using an alkaline slurry

Chuanjin Huang, Wenxiang Mu, Hai Zhou et al. · RSC Advances · 2018 · 62 citations · Full text

, , +15

1–5 of 76

Authors

330

  1. YT
    Yebing Tian

    Shandong University of Technology, China

    4 publications · 128 citations

    4

    h-index

  2. ZZ
    Z.W. Zhong

    Nanyang Technological University, Singapore

    4 publications · 128 citations

    4

    h-index

  3. JL
    Jing Lü

    Huaqiao University, China

    4 publications · 115 citations

    4

    h-index

  4. YJ
    Y. J. Ang

    Singapore Institute of Manufacturing Technology, Singapore

    3 publications · 103 citations

    3

    h-index

  5. XX
    Xiaoming Xu

    Center for Drug Evaluation and Research, United States

    3 publications · 95 citations

    3

    h-index

1–5 of 330

Institutions

112

  1. Singapore Institute of Manufacturing Technology

    Singapore, Singapore

    5 h-index

    9 publications

    279 citations

  2. Huaqiao University

    Xiamen, China

    4 h-index

    18 publications

    483 citations

  3. Nanyang Technological University

    Singapore, Singapore

    4 h-index

    7 publications

    219 citations

  4. Pusan National University

    Busan, South Korea

    4 h-index

    13 publications

    235 citations

  5. Tsinghua University

    Beijing, China

    4 h-index

    14 publications

    794 citations

  6. The University of Osaka

    Osaka, Japan

    3 h-index

    14 publications

    351 citations

  7. Kumamoto University

    Kumamoto, Japan

    3 h-index

    10 publications

    552 citations

  8. National Institute of Advanced Industrial Science and Technology

    Tsukuba, Japan

    2 h-index

    3 publications

    58 citations

1–8 of 112

Venues

  1. Diamond and Related Materials

    6 publications · 272 citations

    6

    h-index

  2. 5

    h-index

  3. Precision Engineering

    4 publications · 78 citations

    4

    h-index

  4. 4

    h-index

  5. Applied Physics Letters

    3 publications · 53 citations

    3

    h-index

1–5