Applied Surface Science · 2015 · 63 citations · 38 references
EngineeringMaterials EngineeringMaterials ScienceColloid ScienceMaterials ProcessingMetallurgyMachiningSurface FinishingSurface ModificationSurface PreparationSurface TreatmentMechanical PolishingPolishingPolishing ProcessesPolishing Slurry FormulationSubstrate Polishing
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Chemical mechanical polishing: Theory and experiment
Dewen Zhao, Xinchun Lu · Friction · 2013 · 229 citations · Full text