Publication | Closed Access
A study of chemical products formed on sapphire (0001) during chemical–mechanical polishing
82
Citations
32
References
2015
Year
Materials ScienceChemical EngineeringEngineeringMaterial ProcessingSurface ScienceChemical ProductsSurface TreatmentChemistrySurface PolishingSurface ProcessingMicrostructureMetal ProcessingChemical–mechanical Polishing
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