Post-contamination Cleaning
Post-Contamination Cleaning is a methodological framework within deep cleaning procedures that specifically addresses the systematic removal and mitigation of residual contaminants after an initial contamination event, distinguishing it from preventive or routine cleaning protocols by its reactive and targeted intervention focus.
34
Publications
1.1K
Citations
160
Authors
46
Institutions
Publications per year
2017–2026
16
Parents
34
Effect of a novel chelating agent on defect removal during post-CMP cleaning
J. M. Hong, Xinhuan Niu, Yuling Liu et al. · Applied Surface Science · 2016 · 88 citations
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46

Hebei University of Technology
Tianjin, China
7 h-index
49 publications
2K citations

Tianjin University of Technology
Tianjin, China
6 h-index
40 publications
1.7K citations

Hanyang University
Seoul, South Korea
5 h-index
30 publications
621 citations
Ebara (Japan)
Tokyo, Japan
4 h-index
10 publications
197 citations
Anyang University
Anyang-si, South Korea
3 h-index
3 publications
57 citations

National Yang Ming Chiao Tung University
Hsinchu, Taiwan
3 h-index
8 publications
174 citations
North China Institute of Aerospace Engineering
Langfang, China
2 h-index
6 publications
137 citations
National Institutes of Applied Research
Taipei, Taiwan
2 h-index
4 publications
55 citations
1–8 of 46
4 publications · 142 citations
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3 publications · 59 citations
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JSS · 3 publications · 91 citations
3
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2 publications · 52 citations
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2 publications · 57 citations
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1–5