Baoguo Zhang

Improvement in chemical mechanical polishing of 4H-SiC wafer by activating persulfate through the synergistic effect of UV and TiO2

Wantang Wang, Baoguo Zhang, Yunhui Shi et al. · Journal of Materials Processing Technology · 2021 · 103 citations

Materials Science, Materials Engineering, Chemical Engineering +11

Improved chemical mechanical polishing performance in 4H-SiC substrate by combining novel mixed abrasive slurry and photocatalytic effect

Wantang Wang, Baoguo Zhang, Yunhui Shi et al. · Applied Surface Science · 2021 · 92 citations

Materials Science, Materials Engineering, Chemical Engineering +12

Effect of a novel chelating agent on defect removal during post-CMP cleaning

J. M. Hong, Xinhuan Niu, Yuling Liu et al. · Applied Surface Science · 2016 · 87 citations

Chemical Engineering, Engineering, Decontamination +7

Improving the Quality of GaN Crystals by Using Graphene or Hexagonal Boron Nitride Nanosheets Substrate

Lei Zhang, Xianlei Li, Yongliang Shao et al. · ACS Applied Materials & Interfaces · 2015 · 77 citations

Materials Science, Electrical Engineering, Epitaxial Growth +14

Improvement in dispersion stability of alumina suspensions and corresponding chemical mechanical polishing performance

Wantang Wang, Baoguo Zhang, Yunhui Shi et al. · Applied Surface Science · 2022 · 60 citations

Materials Science, Dispersion Stability, Engineering +5