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Improvement in chemical mechanical polishing of 4H-SiC wafer by activating persulfate through the synergistic effect of UV and TiO2

Materials ScienceMaterials EngineeringChemical EngineeringSynergistic EffectEngineeringMaterial ProcessingCorrosionMechanical EngineeringSurface ScienceCeramic Synthesis4H-sic WaferChemical Mechanical PolishingSurface ProcessingCarbide