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Improved chemical mechanical polishing performance in 4H-SiC substrate by combining novel mixed abrasive slurry and photocatalytic effect

Materials ScienceMaterials EngineeringChemical EngineeringEngineeringMaterial Processing4H-sic SubstrateMechanical EngineeringSurface SciencePhotocatalysisAbrasive ProcessSurface TreatmentSurface PolishingSurface ProcessingPhotocatalytic EffectCarbide