Concepedia

Publication | Closed Access

Applications of Ni-based silicides to 45 nm CMOS and Beyond

DOI

25

Citations

11

References

2004

Year

J. A. Kittl, A. Lauwers, O. Chamirian, Małgorzata Pawlak, Mark van Dal, A. Akheyar, Muriel de Potter, Anil Kottantharayil, Geoffrey Pourtois, Richard Lindsay,
MRS Proceedings

References

YearCitations

Page 1