New challenges and opportunities for 3D integrations

J. Michailos, P. Coudrain, A. Farcy, N. Hotellier, S. Chéramy, S. Lhostis, E. Deloffre, Y. Sanchez, A. Jouve, F. Guyader,

2015 · 17 citations · 2 references

Concepts

Abstract

From low density 3D integrations embedding Via Last Through Silicon Vias (TSV) to high densities hybrid bonding or 3D VSLI CoolCubeTM solutions, a multitude of new product opportunities is now envisioned. An overview of existing emerging 3D integrations is provided covering Image sensors, Photonics, MEMS, Wide I/O memories and Silicon Interposers for advanced logics. Associated key challenges and developments are highlighted focusing on 3D platform performance assessment.

References

2