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Pad porosity, compressibility and slurry delivery effects in chemical-mechanical planarization: modeling and experiments

Materials ScienceChemical EngineeringPore StructureEngineeringSlurry Delivery EffectsMechanical EngineeringPorous MembraneCompression (Physics)PorosityRheologySolid MechanicsPad PorosityPlasticityChemical-mechanical PlanarizationPorous BodyMechanics Of Materials