Concepedia

Scott R. Runnels

SR

6

Publications

526

Citations

6

H-Index

1991

Active since

Affiliations

Southwest Research Institute(Current)

Scott R. Runnels is an author at Southwest Research Institute specializing in engineering, mechanical engineering, and materials science.

Top concepts

EngineeringMechanical EngineeringMaterial ScienceSurface PolishingMaterial ProcessingNumerical SimulationInterfacial PhenomenaCorrosion3D PrintingGeomechanics

Publications per year

1991–1999

6

Publications

6

Tribology Analysis of Chemical‐Mechanical Polishing

Scott R. Runnels, L. Michael Eyman · Journal of The Electrochemical Society · 1994 · 244 citations

Materials Science, Tribology Analysis, Tribological Coating +13

Feature‐Scale Fluid‐Based Erosion Modeling for Chemical‐Mechanical Polishing

Scott R. Runnels · Journal of The Electrochemical Society · 1994 · 167 citations

Materials Science, Wafer Scale, Erosion Modeling +15

Modelling tool for chemical-mechanical polishing design and evaluation

Scott R. Runnels, I. Kim, J. Schleuter et al. · IEEE Transactions on Semiconductor Manufacturing · 1998 · 39 citations

Engineering, Industrial Engineering, Mechanical Engineering +20

FINITE ELEMENT SIMULATION OF PHASE CHANGE USING CAPACITANCE METHODS

Scott R. Runnels, Graham F. Carey · Numerical Heat Transfer Part B Fundamentals · 1991 · 33 citations

Advances in physically based erosion simulators for CMP

Scott R. Runnels · Journal of Electronic Materials · 1996 · 29 citations

Geotechnical Engineering, Soil Erosion, Engineering +7

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