Concepedia

Christopher L. Borst

CL

10

Publications

299

Citations

10

H-Index

1997

Active since

Affiliations

Rensselaer Polytechnic Institute(Current)

Christopher L. Borst is an author at Rensselaer Polytechnic Institute specializing in engineering, chemical engineering, and materials science.

Top concepts

EngineeringMaterial ScienceChemical EngineeringMechanical EngineeringChemistrySurface SciencePolymersRheologyMechanicsPolymer Science

Publications per year

1997–2014

10

Publications

10

Pad porosity, compressibility and slurry delivery effects in chemical-mechanical planarization: modeling and experiments

Dipto G. Thakurta, Christopher L. Borst, Donald W. Schwendeman et al. · Thin Solid Films · 2000 · 91 citations

Materials Science, Chemical Engineering, Pore Structure +13

Three-Dimensional Chemical Mechanical Planarization Slurry Flow Model Based on Lubrication Theory

Dipto G. Thakurta, Christopher L. Borst, Donald W. Schwendeman et al. · Journal of The Electrochemical Society · 2001 · 57 citations

Engineering, Fluid Mechanics, Mechanical Engineering +22

Surface Kinetics Model for SiLK Chemical Mechanical Polishing

Christopher L. Borst, Dipto G. Thakurta, William N. Gill et al. · Journal of The Electrochemical Society · 2002 · 34 citations

Materials Science, Chemical Engineering, Surface Kinetics Model +15

Chemical Mechanical Polishing Mechanisms of Low Dielectric Constant Polymers in Copper Slurries

Christopher L. Borst, Dipto G. Thakurta, William N. Gill et al. · Journal of The Electrochemical Society · 1999 · 32 citations

Engineering, Mechanical Engineering, Chemistry +20

Chemical–mechanical polishing of SiOC organosilicate glasses: the effect of film carbon content

Christopher L. Borst, Vincent Korthuis, G. Shinn et al. · Thin Solid Films · 2001 · 26 citations

Materials Science, Film Carbon Content, Chemical Engineering +7

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