Christopher L. Borst

Author

Rensselaer Polytechnic Institute ORCID

Also Known As

Borst, Christopher, C. Borst, Chris Borst, Christopher Borst, Christopher L Borst, Christopher L. Borst, Clark Borst

Publications

371

Citations

H-Index

Concepts

All Affiliations

Rensselaer Polytechnic Institute

About

Christopher L. Borst is an author at Rensselaer Polytechnic Institute specializing in engineering, chemical engineering, and materials science.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	8	8	279
2	Chemical Engineering	6	6	250
3	Natural Sciences	1	1	19
4	Applied Physics	1	1	10
5	Biochemistry	1	1	19

Christopher L. Borst

Publications

299

Citations

H-Index

Page 1

	Year	Citations
Pad porosity, compressibility and slurry delivery effects in chemical-mechanical planarization: modeling and experiments Dipto G. Thakurta, Christopher L. Borst, Donald W. Schwendeman, Thin Solid Films Materials ScienceChemical EngineeringPore StructureEngineeringSlurry Delivery Effects	2000	91
Three-Dimensional Chemical Mechanical Planarization Slurry Flow Model Based on Lubrication Theory Dipto G. Thakurta, Christopher L. Borst, Donald W. Schwendeman, Journal of The Electrochemical Society EngineeringFluid MechanicsMechanical EngineeringComputational MechanicsGas-liquid Flow	2001	57
Surface Kinetics Model for SiLK Chemical Mechanical Polishing Christopher L. Borst, Dipto G. Thakurta, William N. Gill, Journal of The Electrochemical Society Materials ScienceChemical EngineeringSurface Kinetics ModelEngineeringSurface Chemistry	2002	34
Chemical Mechanical Polishing Mechanisms of Low Dielectric Constant Polymers in Copper Slurries Christopher L. Borst, Dipto G. Thakurta, William N. Gill, Journal of The Electrochemical Society EngineeringMechanical EngineeringChemistryPolymersChemical Engineering	1999	32
Chemical–mechanical polishing of SiOC organosilicate glasses: the effect of film carbon content Christopher L. Borst, Vincent Korthuis, G. Shinn, Thin Solid Films Materials ScienceFilm Carbon ContentChemical EngineeringGlass-ceramicEngineering	2001	26
Temperature effects on equilibrium and mass transfer of phenylalanine in cation exchangers Christopher L. Borst, D.Sean Grzegorczyk, Sara J. Strand, Reactive and Functional Polymers EngineeringIon ExchangeBiochemistryNatural SciencesTemperature Effects	1997	19
Chemical-Mechanical Planarization of Low-k Polymers for Advanced IC Structures Christopher L. Borst, Dipto G. Thakurta, William N. Gill, Journal of Electronic Packaging EngineeringMechanical EngineeringChemistryMolecular PolymerLow Dielectric Constant	2002	10
Progress in a novel high-throughput mechanical texturization technology for highly efficient multicrystalline silicon solar cells P. Fath, Christopher L. Borst, Christoph Zechner, Solar Energy Materials and Solar Cells	1997	10
Study of millisecond laser annealing on recrystallization, activation, and mobility of laser annealed SOI doped via arsenic ion implantation T. Michalak, J. Herman, Adarsh Basavalingappa, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena	2014	10
Double patterning combined with shrink technique to extend ArF lithography for contact holes to 22nm node and beyond Xiangqun Miao, Lior Huli, Hao Chen, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyBeam LithographyMicrofabricationMicroscopy	2008	10

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