Chemical–mechanical polishing of SiOC organosilicate glasses: the effect of film carbon content - Concepedia

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Chemical–mechanical polishing of SiOC organosilicate glasses: the effect of film carbon content

26

Citations

11

References

2001

Year

Christopher L. Borst, Vincent Korthuis, G. Shinn, J. D. Luttmer, R.J. Gutmann, William N. Gill

Thin Solid Films

Materials ScienceFilm Carbon ContentChemical EngineeringGlass-ceramicEngineeringGlassy CarbonGlass MaterialChemistrySioc Organosilicate GlassesChemical–mechanical Polishing

References

	Year	Citations

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