G. Shinn

Excimer laser photoablation of silicon

G. Shinn, Frank Steigerwald, H. Stiegler et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 52 citations

Excimer Laser Ablation, Optical Materials, Engineering +24

Chemical–mechanical polishing of SiOC organosilicate glasses: the effect of film carbon content

Christopher L. Borst, Vincent Korthuis, G. Shinn et al. · Thin Solid Films · 2001 · 26 citations

Materials Science, Film Carbon Content, Chemical Engineering +7

Manufacturable High-Density 8 Mbit One Transistor–One Capacitor Embedded Ferroelectric Random Access Memory

Krishna Udayakumar, T. S. Moise, Scott R. Summerfelt et al. · Japanese Journal of Applied Physics · 2008 · 22 citations

Non-volatile Memory, Engineering, Emerging Memory Technology +18

Laser-assisted metalorganic chemical vapor deposition of zinc selenide epitaxial films

G. Shinn, P. M. Gillespie, William L. Wilson et al. · Applied Physics Letters · 1989 · 15 citations

Optical Materials, Epitaxial Zinc Selenide, Engineering +21

A study of within-wafer non-uniformity metrics

T. Smith, Duane S. Boning, S. Fang et al. · 2003 · 14 citations

Materials Science, Within-wafer Nonuniformity, Multiple Metrics +15