Concepedia

T. Smith

TS

12

Publications

451

Citations

11

H-Index

1995

Active since

Affiliations

Massachusetts Institute of Technology(Current)

University of Michigan

Texas Instruments (United States)

T. Smith is an author at Massachusetts Institute of Technology specializing in engineering, systems engineering, and process control.

Top concepts

EngineeringSystems EngineeringProcess ControlComputer EngineeringMaterial ScienceIndustrial EngineeringProduction EngineeringMicroelectronicsMaterial ProcessingMechanical Engineering

Publications per year

1995–2009

12

Publications

12

Run by run control of chemical-mechanical polishing

Duane S. Boning, William P. Moyne, T. Smith et al. · 2002 · 87 citations

Engineering, Industrial Engineering, Mechanical Engineering +18

Run by run control of chemical-mechanical polishing

Duane S. Boning, W.P. Moyne, T. Smith et al. · IEEE Transactions on Components Packaging and Manufacturing Technology Part C · 1996 · 82 citations

Engineering, Industrial Engineering, Mechanical Engineering +19

A self-tuning EWMA controller utilizing artificial neural network function approximation techniques

T. Smith, Duane S. Boning · IEEE Transactions on Components Packaging and Manufacturing Technology Part C · 1997 · 62 citations

Controller Parameters, Engineering, Self-tuning Ewma Controller +13

Run by run advanced process control of metal sputter deposition

T. Smith, Duane S. Boning, Jerry A. Stefani et al. · IEEE Transactions on Semiconductor Manufacturing · 1998 · 53 citations

Engineering, Process Instrumentation, Industrial Engineering +16

Artificial neural network exponentially weighted moving average controller for semiconductor processes

T. Smith, Duane S. Boning · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 35 citations

Real-time Control, Engineering, Industrial Engineering +17

Rows per page

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