Concepedia

Jerry A. Stefani

JA

10

Publications

402

Citations

10

H-Index

1988

Active since

Affiliations

Texas Instruments (United States)(Current)

IBM (United States)

Columbia University

Massachusetts Institute of Technology

Jerry A. Stefani is an author at Texas Instruments (United States) specializing in engineering, microelectronics, and process control.

Top concepts

EngineeringMicroelectronicsBusinessProcess ControlProcess MeasurementSystems EngineeringComputer EngineeringApplied PhysicsIndustrial EngineeringMaterial Science

Publications per year

1988–2003

10

Publications

10

Supervisory run-to-run control of polysilicon gate etch using in situ ellipsometry

Stephanie Watts Butler, Jerry A. Stefani · IEEE Transactions on Semiconductor Manufacturing · 1994 · 224 citations

Supervisory Run-to-run Control, Engineering, Process Instrumentation +14

Run by run advanced process control of metal sputter deposition

T. Smith, Duane S. Boning, Jerry A. Stefani et al. · IEEE Transactions on Semiconductor Manufacturing · 1998 · 53 citations

Engineering, Process Instrumentation, Industrial Engineering +16

Application of Predictor Corrector Control to Polysilicon Gate Etching

Stephanie Watts Butler, Jerry A. Stefani · 1993 · 26 citations

Engineering, Industrial Engineering, Silicon On Insulator +17

Intelligent model-based control system employing <i>in situ</i> ellipsometry

Stephanie Watts Butler, Jerry A. Stefani, M. Sullivan et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 21 citations

Engineering, Industrial Engineering, Control Systems +19

Advanced process control of a CVD tungsten reactor

Jerry A. Stefani, Scott Poarch, Sharad Saxena et al. · IEEE Transactions on Semiconductor Manufacturing · 1996 · 21 citations

Cvd Tungsten, Cvd Tungsten Process, Engineering +15

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