Concepedia

M. Sullivan

MS

2

Publications

33

Citations

2

H-Index

1994

Active since

Affiliations

Texas Instruments (United States)(Current)

M. Sullivan is an author at Texas Instruments (United States) specializing in process control, computer engineering, and business.

Top concepts

Publications per year

1994–1994

2

Publications

2

Intelligent model-based control system employing <i>in situ</i> ellipsometry

Stephanie Watts Butler, Jerry A. Stefani, M. Sullivan et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 21 citations

, , +19

A control-to-target architecture for process control

M. Sullivan, Stephanie Watts Butler, J. Hirsch et al. · IEEE Transactions on Semiconductor Manufacturing · 1994 · 12 citations

, , +22

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