3
Publications
131
Citations
3
H-Index
1995
Active since
Affiliations
William P. Moyne is an author at University of Michigan specializing in process control, systems engineering, and engineering.
Top concepts
EngineeringProcess ControlSystems EngineeringProcess DesignComputer EngineeringProcess OptimizationIndustrial EngineeringMechanical EngineeringProduction EngineeringComputer-aided Engineering
Publications per year
1995–2002
3
3
Run by run control of chemical-mechanical polishing
Duane S. Boning, William P. Moyne, T. Smith et al. · 2002 · 87 citations
Engineering, Industrial Engineering, Mechanical Engineering +18
Practical issues in run by run process control
Duane S. Boning, William P. Moyne, T. Smith et al. · 1995 · 29 citations
Engineering, Industrial Engineering, Run Process Control +18
A multilevel approach to the control of a chemical–mechanical planarization process
Roland Telfeyan, James Moyne, Nauman Chaudhry et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 15 citations
Process Integration, Engineering, Chemical–mechanical Planarization Process +21
Rows per page
1–3 of 3