Dipto G. Thakurta

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Publications

Citations

513

H-Index

Active since

1999

Affiliations

Rensselaer Polytechnic Institute(Current)

Intel (United States)

Dipto G. Thakurta is an author at Rensselaer Polytechnic Institute specializing in materials engineering, materials science, and chemical mechanical planarization.

Publications per year

1999–2025

Publications

Two‐Dimensional Wafer‐Scale Chemical Mechanical Planarization Models Based on Lubrication Theory and Mass Transport

Srikanth Sundararajan, Dipto G. Thakurta, Donald W. Schwendeman et al. · Journal of The Electrochemical Society · 1999 · 148 citations

Engineering, Materials Engineering, Materials Science +15

Pad porosity, compressibility and slurry delivery effects in chemical-mechanical planarization: modeling and experiments

Dipto G. Thakurta, Christopher L. Borst, Donald W. Schwendeman et al. · Thin Solid Films · 2000 · 91 citations

Engineering, Chemical Engineering, Mechanical Behavior Of Materials +13

Three-dimensional wafer-scale copper chemical–mechanical planarization model

Dipto G. Thakurta, Donald W. Schwendeman, R.J. Gutmann et al. · Thin Solid Films · 2002 · 60 citations

Engineering, Materials Engineering, Materials Science +9

Three-Dimensional Chemical Mechanical Planarization Slurry Flow Model Based on Lubrication Theory

Dipto G. Thakurta, Christopher L. Borst, Donald W. Schwendeman et al. · Journal of The Electrochemical Society · 2001 · 58 citations

Engineering, Chemical Engineering, Materials Engineering +14

Intel 4 CMOS Technology Featuring Advanced FinFET Transistors optimized for High Density and High-Performance Computing

B. Sell, Seungchan An, Jeffrey L. Armstrong et al. · 2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) · 2022 · 43 citations

Engineering, Electrical Engineering, High-performance Computing +17

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