Total dose effects and SEE screening on MEMS COTS accelerometers

O. Cournar, F. L. Miller, N. Buard, P. Poirot, R. Gaillard, L. Marchand

2005 · 11 citations · 5 references

Concepts

Abstract

Two families of MEMS COTS are characterized for the total dose response, latch-up and SET sensitivity. These MEMS are microelectromechanical sensors: ADXL150 and SCA 600, which are fabricated with surface and bulk micromachining techniques.

References

5