Publication | Closed Access
Total dose effects on Microelectromechanical Systems (MEMS): accelerometers
66
Citations
4
References
1996
Year
EngineeringMeasurementAccelerometerXmmas40g AccelerometersMicroelectromechanical SystemsSensor TechnologyMicro-electromechanical SystemKinesiologyCalibrationMicroelectromechanical SensorsInstrumentationWhole DeviceTotal Dose EffectsRadiation DetectionRadiation MonitoringIonizing RadiationMicroelectronicsDosimetrySensorsMicrofabricationRadiation DoseMedicine
Microelectromechanical sensors, ADXL50 and XMMAS40G accelerometers which are fabricated with surface micromachining techniques are characterized for their total dose radiation response. Different failure mechanisms were observed when the sensor element or the whole device was irradiated.
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