Metamorphic InAlAs/InGaAs HEMTs on GaAs substrates with a novel composite channels design

M. Chertouk, D. Xu, S. Kraus, Wilhelm Klein, G. Böhm, G. Tränkle, G. Weimann

IEEE Electron Device Letters · 1996 · 93 citations · 5 references

Concepts

Abstract

We report on fabrication and performance of novel 0.13 μm T-gate metamorphic InAlAs/InGaAs HEMTs on GaAs substrates with composite InGaAs channels, combining the superior transport properties of In/sub 0.52/Ga/sub 0.48/As with low-impact ionization in the In/sub 0.32/Ga/sub 0.68/As subchannel. These devices exhibit excellent DC characteristics, high drain currents of 750 mA/mm, extrinsic transconductances of 600 mS/mm, combined with still very low output conductance values of 20 mS/mm, and high channel and gate breakdown voltages. The use of a composite InGaAs channels leads to excellent cut-off frequencies: f <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">max</sub> of 350 GHz and an f <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">T</sub> 160 GHz at V/sub DS/=1.5 V. These are the best microwave frequency results ever reported for any FET on GaAs substrate.

References

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