Publication | Closed Access
The NanoPirani—an extremely miniaturized pressure sensor fabricated by focused ion beam rapid prototyping
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Citations
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References
2002
Year
NanosensorsEngineeringSensorsMicrofabricationNanotechnologyApplied PhysicsMiniaturized Pressure SensorIon Beam PhysicsIon Beam InstrumentationIon BeamBiomedical EngineeringSensor DesignInstrumentationSensor Technology
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