Surface and Coatings Technology · 2004 · 140 citations · 20 references
Natural SciencesMaterials EngineeringMaterials ScienceSemiconductor MaterialsSurface ScienceThin FilmsSemiconductor Crystal GrowthSemiconductor SurfacesSemiconductor Thin FilmsSurface PhysicsThin-film DepositionThin-film MaterialsFilm Growth MechanismsMagnetron SputteringSputter DepositionSurface GrowthThin-film Growth Mechanisms
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Isamu Akasaki, Hiroshi Amano, Yasuo Koide et al. · Journal of Crystal Growth · 1989 · 688 citations
Vibrational properties of AlN grown on (111)-oriented silicon
T. Prokofyeva, M. Seon, J. Vanbuskirk et al. · Physical review. B, Condensed matter · 2001 · 260 citations