Concepedia

Publication | Closed Access

Growth of AlN films on Si (100) and Si (111) substrates by reactive magnetron sputtering

DOI

140

Citations

20

References

2004

Year

J.X. Zhang, Hao Cheng, Y.Z. Chen, Ashraf Uddin, Shu Yuan, Shu Geng, Sam Zhang
Surface and Coatings Technology

References

YearCitations

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