Optical Engineering · 1997 · 31 citations · 5 references
EngineeringElectrical EngineeringPhysicsElectromagneticsMicroelectromechanical SystemsMicrofabricationBulk MicromachiningMagnetic Thin FilmsMems DesignMems FabricationMems ModelingMicromachiningElectromechanical CouplingElectromechanical ModelingHolographic Data StorageMems MicromirrorsMems MirrorsSilicon Micromachining
We report a new magnetic MEMS technology that enables many electromagnetic MEMS devices. This new technology combines magnetic thin films and silicon bulk micromachining. Its use is demonstrated by two types of millimeter-sized analog scanning mirrors that are capable of delivering deflection angles exceeding 60 deg. Details include the design, fabrication, operation, as well as a complete electromechanical model of the mirrors. In addition, the use of the mirrors is further manifested in a holographic data storage system where hundreds of holograms have been successfully stored and retrieved.
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Janusz Bryzek, K. Peterson, Wendell McCulley · IEEE Spectrum · 1994 · 202 citations
Engineering, Electrical Engineering, Mechanical Engineering +17
A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems
Chang Liu, T. Tsao, Wenheng Liu et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 66 citations · Full text
Engineering, Electrical Engineering, Robotics Engineering +17
Out-of-plane permalloy magnetic actuators for delta-wing control
Chang Liu, T. Tsao, Tzong-Shyng Leu et al. · 2005 · 49 citations
Electromagnetic MEMS Scanning Mirrors for Holographic Data Storage
Raanan A. Miller, Geoffrey W. Burr, Y-C. Tai et al. · 1996 · 38 citations · Full text