Electromagnetic MEMS Scanning Mirrors for Holographic Data Storage

Abstract

A mm-sized analog scanning MEMS mirror capable of deflection angles exceeding 60 degrees has been designed and fabricated. Development of this mirror is driven by the need for simple, compact and inexpensive 3-D volume holographic storage systems. Deflection is achieved through the control of an external magnetic field which interacts with a permalloy layer and the current in a 30-tum copper coil. Modeling of the device is also provided here and it agrees with experimental measurements. The use of the mirror is demonstrated in a holographic data storage system and hundreds of holograms have been successfully stored and retrieved.