Silicon cantilevers and tips for scanning force microscopy - Concepedia

Concepedia

Publication | Open Access

Silicon cantilevers and tips for scanning force microscopy

DOI Full Paper Access

70

Citations

20

References

1992

Year

Juergen Brügger, R.A. Buser, N. F. de Rooij

Sensors and Actuators A Physical

EngineeringMicrofabricationMicroscopySilicon CantileversMechanical EngineeringApplied PhysicsMicroscopy MethodScanning Probe MicroscopyScanning Force Microscopy

References

	Year	Citations

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