Applied Physics Letters · 1988 · 1.3K citations · 7 references
Natural SciencesPhysicsAtomic PhysicsOpticsSurface ScienceAtomic Force MicroscopyDeflection Of BeamsForce SensingForce SensorsNanomechanicsScanning Probe MicroscopyCantilever Beam DeflectionCantilever Deflection DetectionCantilever MechanicsSurface Force Measurements
A sensitive and simple optical method for detecting the cantilever deflection in atomic force microscopy is described. The method was incorporated in an atomic force microscope, and imaging and force measurements, in ultrahigh vacuum, were successfully performed.
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