Computational methods for design and control of MEMS micromanipulator arrays

Abstract

As improvements in fabrication technology for microelectromechanical systems, or MEMS, increase the availability and diversity of these micromachines, engineers are defining a growing number of tasks to which they can be put. The idea of carrying out tasks using large coordinated groups of MEMS units motivates the development of automated, algorithmic methods for designing and controlling these groups of devices. We report on progress towards computational MEMS, taking on the challenge of design and control of massively parallel arrays of microactuators. Arrays of MEMS devices can move and position tiny parts, such as integrated circuit chips, in flexible and predictable ways by oscillatory or ciliary action. The theory of programmable force fields can model this action, leading to algorithms for various types of micromanipulation that require no sensing of where the part is. Experiments support the theory.