SiGe HBTs featuring f<sub>T</sub> ≫400GHz at room temperature

B. Geynet, F. Danneville, D. Dutartre, A. Chantre, P. Chevalier, B. Vandelle, F. Brossard, N. Zerounian, M. Buczko, D. Gloria,

2008 · 24 citations · 11 references

Concepts

Abstract

This paper presents the results of investigations on process thermal budget reduction in order to increase the operation frequency of SiGe HBTs. We describe the variations of DC and AC characteristics of the devices with the spike annealing temperature. Record peak f <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">T</sub> values of 410 GHz and 640 GHz are reported at room and cryogenic temperatures respectively.

References

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