A 16-Mbit DRAM with a relaxed sense-amplifier-pitch open-bit-line architecture

Masasi Inoue, T. Yamada, H. Kotani, H. Yamauchi, Akira Fujiwara, J. Matsushima, H. Akamatsu, Motoyuki Fukumoto, Masafumi Kubota, I. Nakao,

IEEE Journal of Solid-State Circuits · 1988 · 32 citations · 13 references

Concepts

Abstract

A 16-Mb dynamic RAM has been designed and fabricated using 0.5- mu m CMOS technology with double-level metallization. It uses a novel trench-type surrounding high-capacitance cell (SCC) that measures only 3.3- mu m/sup 2/ in cell size with a 63-fF storage capacitance. A novel relaxed sense-amplifier-pitch (RSAP) open-bit-line architecture used on the DRAM achieves a high-density memory cell array, while maintaining a large enough layout pitch for the sense amplifier. These concepts allow the small chip that measures 5.4*17.38 (93.85) mm/sup 2/ to be mounted in a 300-mil dual-in-line package with 65-ns RAS access time and 35-ns column address access time.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>

References

13