Publication | Closed Access
A trench transistor cross-point DRAM cell
47
Citations
3
References
1985
Year
Unknown Venue
Electrical EngineeringEngineeringDeep TrenchNanoelectronicsDram CellComputer EngineeringTrench Transistor CellSemiconductor MemoryMicroelectronicsSemiconductor DeviceElectronic Circuit
A 1T DRAM cell with both the transistor and the capacitor fabricated on the sidewalls of a deep trench is described. Trench Transistor Cell (TTC) fabrication and characterization are discussed.
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