Fabrication flaws and reliability in MEMS thin film polycrystalline flow sensor

Modeling and optimization of monolithic polycrystalline silicon resistors

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MEMS reliability: Where are we now?

Microelectronics Reliability · 2009 · 87 citations

Engineering, Electrical Engineering, Mechanical Engineering +12

On MEMS Reliability and Failure Mechanisms

Daniel J. Fonseca, Miguel Sequera · Journal of Quality and Reliability Engineering · 2011 · 69 citations · Full text

Engineering, Manufacturing Engineering, Mechanical Engineering +14